Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1974-09-05
1976-06-29
Rutledge, L. Dewayne
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
148175, 313385, 313386, 357 16, 357 30, 357 11, 427 76, 427 83, 427 87, 427 89, 01L 2714, H01L 2106, H01L 21203
Patent
active
039665127
ABSTRACT:
In a method of manufacturing the target of a pickup tube of the class wherein an N-type light transmitting conductive film is formed on a substrate, an N-type photoconductive film consisting of a group II-VI compound is formed on the N-type light transmitting conductive film by means of a vacuum deposition device comprising a boat for containing the compound and a hollow shielding member, and then a P-type amorphous photoconductive film consisting essentially of metal selenium is applied onto the N-type photoconductive film. The temperature of the substrate is maintained in a range of from 50.degree.C to 250.degree.C when the N-type photoconductive film is formed on the N-type light transmitting conductive film. The distance between the boat and the substrate is maintained in a range of from 8 to 13 cm. The boat and the substrate are contained in the hollow shielding member thereby maintaining homogeneous atmosphere of the group II-IV compound about the boat and the substrate, and the boat is preheated to a predetermined temperature.
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Hitachi , Ltd.
Pfund Charles E.
Rutledge L. Dewayne
Saba W. G.
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