Method of manufacturing surface acoustic ware modules

Details Method of manufacturing surface acoustic ware modules Method of manufacturing surface acoustic ware modules

1998-07-22

1999-12-07

Hall, Carl E.

Metal working

Piezoelectric device making

310313R, H01L 4122

Patent

active

059961996

ABSTRACT:
A surface acoustic module is stable, and its operation frequencies can be varied with high precision. A method of manufacturing the surface acoustic module prevents the module's electrodes from being broken during separation of a sheet of modules into individual components. The surface acoustic module includes electrodes for transmitting and receiving a surface acoustic wave, a surface acoustic wave transmitting substrate, a high resistance thin film, and a thin film for differentiating the transmission velocity of a surface acoustic wave at the high resistance thin film from that at the substrate. The method includes the steps of forming a metallic film on a sheet of the surface acoustic wave transmitting substrate, of forming the electrodes on the metallic film, and of irradiating light or the like to the metallic film so as to increase the film's resistivity.

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Oct. 1989, Greer et al., "Applications of Laser-Trimming for All Quartz Package, Surface Acoustic Wave Devices", 1989 Ultrasonics Symposium, Montral, pp. 179-184.
1990, David D. Lide, PH.E. (ed.), CRC Handbook of Chemistry and Physics, 71st edition, pp. 1-10.

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