Method of manufacturing super-conductive tunnel junction devices

Details Method of manufacturing super-conductive tunnel junction devices Method of manufacturing super-conductive tunnel junction devices

1983-07-06

1985-02-12

Morgenstern, Norman

Coating processes

Electrical product produced

Superconductor

427 99, 427250, 4272554, 4272557, 427282, 427404, 4274192, 156643, 156646, 156649, 156656, 1566611, 204 15, 204 38B, 204192E, 29578, H01L 3924, H01L 3922

Patent

active

044991193

ABSTRACT:
Superconductive tunnel junctions are manufactured with precise junction areas by defining a narrow-line junction of precise width utilizing a narrow-line mask of precise width and thereafter applying a second narrow-line mask of precise width at an angle to the narrow-line junction to define a junction area with dimensions precisely controlled by the widths of the narrow-line masks. "Edge lithography" is preferably utilized to provide the narrow-line masks.

REFERENCES:
patent: 4358340 (1982-11-01), Fu
patent: 4421785 (1983-12-01), Kroger
patent: 4432134 (1984-02-01), Jones
Prober et al., Appl. Phys. Lett. 37(1), Jul. 1, 1980, pp. 94-96.
Speidell, J. Vac. Sci. Technol., 19(3), Sep./Oct., 1981 pp. 693-695.
Flanders et al., J. Vac. Sci. Technology, 19(4), Nov./Dec., 1981, pp. 892-896.

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