Printing – Processes
Reexamination Certificate
2007-04-17
2007-04-17
Nguyen, Anthony H. (Department: 2854)
Printing
Processes
C101S484000
Reexamination Certificate
active
10500816
ABSTRACT:
A stamper with a sharp uneven pattern for manufacturing high precision information media and a method of manufacturing a stamper. The method includes (1) manufacturing a photoresist master by forming a light absorption layer and a photoresist layer on substrate, (2) forming a latent image on the photoresist layer, and an uneven pattern in the photoresist layer by developing the latent image, (3) forming a Ni thin film on the uneven pattern by electroless plating, (4) forming a Ni film on the Ni thin film, and (5) removing the Ni thin film and the Ni film from the photoresist master. The method also includes, prior to the step of forming the Ni thin film on the photoresist layer, a metal catalyst being provided on the surface of the uneven pattern, the metal catalyst being activated, and the surface of the uneven pattern being washed with ultra pure water.
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Kawaguchi Yuuichi
Oyake Hisaji
Takahata Hiroaki
Yoneyama Kenji
Nguyen Anthony H.
Oliff & Berridg,e PLC
TDK Corporation
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