Method of manufacturing spin valve film

Details Method of manufacturing spin valve film Method of manufacturing spin valve film

2005-06-21

2005-06-21

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603070, C029S603090, C029S603130, C204S192150, C360S324100, C360S324110, C360S324120, C427S127000, C427S128000, C427S129000, C427S130000, C427S131000

Reexamination Certificate

active

06907654

ABSTRACT:
A method of manufacturing a spin valve film, which produces a large read out signal. After a completion of a film making process for forming a previous film of two films to be formed successively, but before an initiation of a film making process forming a succeeding film of the two the films, a step of decreasing an anisotropic magnetic field of the spin valve film is introduced by interrupting a film making process. This step may be performed by keeping a substrate within a sputtering vacuum chamber. The interruption can be shortened by exposing the substrate to a plasma, transferring the substrate in a separate vacuum chamber whose degree of vacuum is lower or whose H2O or O2concentration is higher than that in the sputtering vacuum chamber, conducting a surface treatment with a gas containing H2O or O2, or flowing a process gas.

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“AMR effect in spin-valve structure”; Uehara, Y.; Yamada, K.; Kanai, H.; Magnetics, IEEE transactions on , vol.: 32 , Issue:, Sep. 1996; pp.: 3431-3433.
Ching Tsang et al., “Design, Fabrication & Testing of Spin-Valve Read Heads for High Density Recording”, IEEE Transactions on Magnetics, vol. 30, No. 6, Nov. 1994.

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