Method of manufacturing solid state imaging device, solid...

Details Method of manufacturing solid state imaging device, solid... Method of manufacturing solid state imaging device, solid...

2011-08-16

2011-08-16

Smith, Matthew (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Charge transfer device

C257S294000, C257S435000, C257SE27133, C438S060000, C438S072000, C345S519000

Reexamination Certificate

active

07999291

ABSTRACT:
A method of manufacturing a solid state imaging device having a photo-electric conversion portion array and a transfer electrode array, these arrays being provided in parallel to each other, upper surfaces and side wall surfaces of the transfer electrode array being covered with a light-shielding layer, and a transparent layer showing an oxidizing property at the time of film formation, the transparent layer being formed on the photo-electric conversion parts and the light-shielding layer.

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