Metal working – Electric condenser making – Solid dielectric type
Patent
1993-10-25
1995-08-29
Vo, Peter Dungba
Metal working
Electric condenser making
Solid dielectric type
29594, 29595, 73718, 3612833, 3612834, H01G 700, G01L 912
Patent
active
054449014
ABSTRACT:
A dual-element, parallel-plate silicon capacitative pressure sensor includes a pressure sensing element and a reference element of identical structure. Both elements are separately fabricated from the same silicon wafers using identical processing steps. Further, both elements are simultaneously mounted to a header using identical mounting steps. Such identical fabrication and mounting steps serve to identically match the dielectric materials and, thus, the aging properties of both the sensing and reference elements. By matching the sensing and reference elements in these ways, and by aging these components at elevated temperatures in exactly the same way, it is possible to achieve an extremely close match in long-term dielectric aging properties.
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Bullis Robert H.
Gobetz Frank W.
Lennon James W.
Towey James P.
Wiegand Walter J.
Dungba Vo Peter
Kosakowski Richard H.
United Technologies Corporation
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