Method of manufacturing silica waveguide optical components

Details Method of manufacturing silica waveguide optical components Method of manufacturing silica waveguide optical components

1993-06-16

1995-01-03

Lindsay, Robert L.

Glass manufacturing

Processes of manufacturing fibers, filaments, or preforms

Process of manufacturing optical fibers, waveguides, or...

65444, 65 6052, 501 12, C03C 2502, C03B 37023

Patent

active

053782569

ABSTRACT:
This invention describes a method of manufacturing silica waveguide optical components in which silica glass films are laminated on a substrate by repeating a unit operation in which a sol material, a precursor of glass particles, is coated and then the coated layer is heated in an oxygen atmosphere. wherein the heating temperature is controlled in such a manner that the radius of curvature of warping of the substrate is 2 m or more after the coated layer is heated, thereby preventing cracking in the formed silica glass film and/or peeling of the coated layer. At locations where a difference in height is present, at least when sol is coated first time, the thickness of the coated layer is less than that of one of the subsequent coated layers.

REFERENCES:
patent: 4816049 (1989-03-01), Hata et al.
patent: 5108479 (1992-04-01), Hirano
patent: 5143533 (1992-09-01), Brusasco

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