Method of manufacturing semiconductor pressure sensor device wit

Details Method of manufacturing semiconductor pressure sensor device wit Method of manufacturing semiconductor pressure sensor device wit

1992-03-18

1993-07-06

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437217, 437220, 296211, H01L 2160

Patent

active

052253732

ABSTRACT:
A semiconductor pressure sensor device that improve the measuring accuracy without providing a silicon base in attaching a semiconductor pressure sensor chip to a lead frame, and a method of manufacturing thereof is disclosed. The semiconductor pressure sensor device includes a die-bond adhesive 10 formed of a resilient material for fixing a semiconductor pressure sensor chip 50 to a lead frame 100, a wire bond receiving projection 4 provided in the diepad where the semiconductor pressure sensor chip 50 is attached for receiving pressure application force from the bottom of the semiconductor pressure sensor chip 50 at the time of wire bonding, and a supporting projection 11 for preventing distortion stress by the wire bond receiving projection 4 from being transmitted. Thermal distortion of the semiconductor pressure sensor chip 50 and the lead frame 100 is absorbed by die-bond adhesive 10. By wire bond receiving projection 4 and supporting projection 11, stress acting on the semiconductor pressure sensor chip 50 is decreased to improve the measuring accuracy.

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patent: 4802952 (1989-02-01), Kobori et al.
patent: 4823605 (1989-04-01), Stein
patent: 4850227 (1989-07-01), Luettgen et al.
patent: 4984466 (1991-01-01), Yasui et al.
patent: 5013396 (1991-05-01), Wise et al.
patent: 5014415 (1991-05-01), Okada

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