Method of manufacturing semiconductor memory device capable of r

Details Method of manufacturing semiconductor memory device capable of r Method of manufacturing semiconductor memory device capable of r

1997-07-24

1999-09-28

Picardat, Kevin M.

Semiconductor device manufacturing: process

Repair or restoration

438 18, 438106, 438613, H01L 2100

Patent

active

059602538

ABSTRACT:
A method of manufacturing a semiconductor memory device includes a first step of forming a plurality of memory cells with a redundancy portion through fine patterning, a second step of searching a defect in masks used in the fine patterning and a third step of forming offset via holes so as to interconnect the redundancy portion instead of a defective portion identified by an inspection in non-fine patterning conducted after the fine patterning.

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