Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2008-04-18
2011-10-25
Thomas, Toniae (Department: 2822)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S482000, C427S074000, C427S255270, C257SE21297
Reexamination Certificate
active
08043885
ABSTRACT:
A method of manufacturing a semiconductor film capable of inhibiting the quality of a semiconductor film from destabilization is obtained. This method of manufacturing a semiconductor film includes steps of introducing source gas for a semiconductor, controlling the pressure of an atmosphere formed by the source gas to a prescribed level, heating a catalytic wire to at least a prescribed temperature after controlling the pressure of the atmosphere to the prescribed level and forming a semiconductor film by decomposing the source gas with the heated catalytic wire.
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Asaumi Toshio
Terakawa Akira
Ditthavong Mori & Steiner, P.C.
Sanyo Electric Co,. Ltd.
Thomas Toniae
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