Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1989-11-07
1990-12-18
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 731, 324158D, 437 8, G01R 2726, G01R 3126
Patent
active
049789155
ABSTRACT:
The TVS method is a voltammetric method for detecting mobile ionic impurities in the dielectric layer of a MOS capacitor structure. Disclosed here is a method of semiconductor device fabrication involving a modified TVS method in which the voltage is changed in discrete steps rather than varied continuously, and charge, rather than induced current, is measured. The modified TVS method can be faster than conventional TVS, and calibration is unnecessary.
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Andrews, Jr. John M.
Lifshitz Nadia
Smolinsky Gerald
AT&T Bell Laboratories
Eisenzopf Reinhard J.
Nguyen Vinh P.
Pacher Eugen E.
Wilde Peter V. D.
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