Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1974-09-06
1976-07-06
Dipalma, Victor A.
Metal working
Method of mechanical manufacture
Assembling or joining
29571, H01L 2188, H01L 21441
Patent
active
039673642
ABSTRACT:
A method of manufacturing a MOSIC comprises the steps of forming a diffused layer selectively in one principal plane of a semiconductor substrate, forming a first insulating film on the substrate, forming a first wiring layer after providing holes in the first insulating film, diffusing an impurity through the holes to form source and drain regions, forming a second insulating film on the first wiring layer, and thereafter forming a second wiring layer which is connected with the diffused layer.
REFERENCES:
patent: 3623217 (1971-11-01), Kawagoe et al.
patent: 3673679 (1972-07-01), Carbajal et al.
patent: 3700507 (1972-10-01), Murray
patent: 3785043 (1974-01-01), Tokuyama et al.
patent: 3789503 (1974-02-01), Nishida et al.
patent: 3803705 (1974-04-01), Goodwin
patent: 3818582 (1974-06-01), Kaiser
patent: 3824677 (1974-07-01), Scherber
DiPalma Victor A.
Hitachi , Ltd.
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