Fishing – trapping – and vermin destroying
Patent
1991-03-05
1994-03-29
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437192, 148DIG131, H01L 21441
Patent
active
052984591
ABSTRACT:
A semiconductor device provided with an external connection terminal composed of a metal bump electrode. A first metal film is formed on the entire surface of the semiconductor device, a second metal film on the first metal film, and a third metal film on the second metal film. A resist film is selectively formed on the third metal film. A metal bump electrode is formed on the third metal film, at a portion at which the resist film is not present by electrolytic plating while using the third metal film as a conductive plating electrode and the resist film as a mask. The resist film is removed and the metal films are etched while using the metal bump electrode as a mask.
REFERENCES:
patent: 4787958 (1988-11-01), Lytle
patent: 4880708 (1989-11-01), Sharma et al.
patent: 5108950 (1992-04-01), Wakabayashi et al.
Arikawa Shinichiro
Murakami Hiroaki
Chaudhari C.
Hearn Brian E.
Seiko Epson Corporation
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