Method of manufacturing semiconductor device provided with compl

Metal working – Method of mechanical manufacture – Assembling or joining

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29576E, 29576W, 29578, 29580, 148175, 148187, 156662, H01L 21223

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043935737

ABSTRACT:
The semiconductor device is provided with semiconductor elements having the complementary characteristics and high breakdown strength. These semiconductor elements are formed in N and P islands respectively each having an inverted frustum shape.
Surfaces of the frustum are inclined by an angle determined by semiconductor crystal structure. Side and bottom surfaces of the islands are formed adjacent to an insulating layer and both islands are supported part from the polycrystalline semiconductor layer. All side and bottom surfaces of the islands adjacent the insulating layer are made of high impurity substance of the same type as respective islands.

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patent: 3453498 (1969-07-01), Hubner
patent: 3461003 (1969-08-01), Jackson
patent: 3507713 (1970-04-01), Kravitz
patent: 3508980 (1970-04-01), Jackson et al.
patent: 3509433 (1970-04-01), Schroeder
patent: 3818583 (1974-06-01), Polata
patent: 3826699 (1974-07-01), Sawazaki et al.
patent: 3938176 (1976-02-01), Sloan
patent: 4283235 (1981-08-01), Raffel et al.
Lee, J. of Applied Physics, vol. 40, No. 1, Oct. 1969, pp. 4569-4574.

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