Method of manufacturing semiconductor device

Details Method of manufacturing semiconductor device Method of manufacturing semiconductor device

2002-02-13

2003-06-03

Dang, Trung (Department: 2823)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Grooved and refilled with deposited dielectric material

C438S424000, C438S154000

Reexamination Certificate

active

06573153

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a method of manufacturing a semiconductor device using an SOI substrate.
2. Description of the Background Art
FIG. 44
is a sectional view showing a structure of a conventional semiconductor device using an SOI substrate. The SOI substrate has a multilayer structure in which a silicon substrate
101
, a BOX (Buried Oxide) layer
102
and a silicon layer
103
are provided in this order. Element isolating films
107
a
to
107
c
having bottom surfaces positioned above an upper surface of the BOX layer
102
are selectively formed in an upper surface of the silicon layer
103
. Such an isolation will be hereinafter referred to as “a partial isolation”.
A PMOS transistor is formed in an element formation region defined by the element isolating films
107
a
and
107
b
. The PMOS transistor has p
+
type source-drain regions
114
a
1
and
114
a
2
opposed to each other with an n
−
type channel formation region
113
a
interposed therebetween, a gate structure
110
a
having a multilayer structure in which a gate insulating film
108
and a gate electrode
109
a
are provided in this order, and a side wall
111
formed on a side surface of the gate structure
110
a
. The source-drain regions
114
a
1
and
114
a
2
and the channel formation region
113
a
are formed in an n
−
type well
112
a.
Moreover, an NMOS transistor is formed in an element formation region defined by the element isolating films
107
b
and
107
c
. The NMOS transistor has n
+
type source-drain regions
114
b
1
and
114
b
2
opposed to each other with a p
−
type channel formation region
113
b
interposed therebetween, a gate structure
110
b
having a multilayer structure in which a gate insulating film
108
and a gate electrode
109
b
are provided in this order, and a side wall
111
formed on a side surface of the gate structure
110
b
. The source-drain regions
114
b
1
and
114
b
2
and the channel formation region
113
b
are formed in a p
−
type well
112
b.
According to the conventional semiconductor device shown in
FIG. 44
, the element isolating films
107
a
to
107
c
of a partial isolation type are formed in the upper surface of the silicon layer
103
. Accordingly, electric potentials of the channel formation regions
113
a
and
113
b
can be externally fixed through the silicon layer
103
between the bottom surfaces of the element isolating films
107
a
to
107
c
and the upper surface of the BOX layer
102
. In other words, a body contact can be taken.
However, the element isolating film
107
b
of the partial isolation type is also formed in a boundary portion of the n
−
type well
112
a
and the p
−
type well
112
b
. Therefore, the p
+
type source-drain region
114
a
2
and the n
+
type source-drain region
114
b
1
are electrically connected to each other through the n
−
type well
112
a
and the p
−
type well
112
b
which are provided under the element isolating film
107
b
. Consequently, there has been a problem in that a parasitic thyristor structure is formed in this portion so that latch up is generated.
SUMMARY OF THE INVENTION
In order to solve such a problem, it is an object of the present invention to obtain a method of manufacturing a semiconductor device which can take a body contact while electrically isolating an NMOS transistor and a PMOS transistor from each other through an insulator formed from an upper surface of a semiconductor layer to a bottom surface thereof (hereinafter referred to as “a complete isolation”) and can also contribute to microfabrication of an element.
A first aspect of the present invention is directed to a method of manufacturing a semiconductor device comprising the steps of (a) preparing a substrate having a multilayer structure in which an underlying layer and a semiconductor layer are provided, (b) selectively forming a first element isolating film which is not in contact with the underlying layer in a first main surface of the semiconductor layer on a side which is not in contact with the underlying layer, (c) forming an element having a conductor region which is positioned only above the first element isolating film on the first main surface of the semiconductor layer, (d) removing at least a part of the underlying layer, and (e) selectively forming a second element isolating film which is in contact with the first element isolating film below the conductor region in a second main surface of the semiconductor layer after the step (d).
A second aspect of the present invention is directed to a method of manufacturing a semiconductor device comprising the steps of (a) preparing a substrate having a multilayer structure in which an underlying layer and a semiconductor layer are provided, (b) selectively forming a first element isolating film which has a bottom portion shallower than bottoms of a first well of a first conductivity type and a second well of a second conductivity type and is not in contact with the underlying layer in a first main surface of the semiconductor layer on a side which is not in contact with the underlying layer in at least one of a first boundary portion between a region where the first well is to be formed and a region where the second well is to be formed and a second boundary portion between a region where a first semiconductor element is to be formed and a region where a second semiconductor element is to be formed in wells of the same conductivity type, (c) removing at least a part of the underlying layer, and (d) selectively forming a second element isolating film which is in contact with the first element isolating film in a second main surface of the semiconductor layer after the step (c).
A third aspect of the present invention is directed to a method of manufacturing a semiconductor device, comprising the steps of (a) preparing a substrate having a first main surface including a boundary between a first region and a second region, (b) selectively forming, in the first main surface of the substrate, a concave portion having a bottom surface which does not reach a second main surface of the substrate on a side opposite to the first main surface in a portion including the boundary, (c) forming a negative photoresist on a structure obtained at the step (b), (d) exposing the photoresist by using a photomask through which a phase of a light emitted above the first region and a phase of a light emitted above the second region are reverse to each other, (e) developing the photoresist after the step (d), (f) removing the substrate in a portion exposed at the step (e), thereby forming a through trench which penetrates from the bottom surface of the concave portion to the second main surface of the substrate, and (g) filling the concave portion and the through trench with an insulating film.
A fourth aspect of the present invention is directed to the method of manufacturing a semiconductor device according to the third aspect of the present invention, wherein the first region is a first well of a first conductivity type, the second region is a second well of a second conductivity type, the photoresist is exposed by using a phase-shifting mask having a shifter pattern in which a shifter for inverting a phase of an incident light is formed above the first region or above the second region at the step (d), and the shifter pattern is created based on design data in which layouts of the first and second wells in the substrate are described.
A fifth aspect of the present invention is directed to the method of manufacturing a semiconductor device according to the third aspect of the present invention, further comprising the step of (h) forming a semiconductor element having a conductor region on the substrate after the step (g), the concave portion being also formed below a region where the conductor region is to be formed at the step (b), and the photoresist being exposed by using a photomask having a mask pattern in which a light shielding film is form

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