Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1980-01-30
1981-09-29
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 86, C23C 1100
Patent
active
042923433
ABSTRACT:
Semiconductor bodies comprised of amorphous silicon are produced by sequentially depositing a plurality of amorphous silicon layers on a heat-resistant substrate by glow discharge in a silicon halide atmosphere at low pressures and low substrate temperatures, with each layer being hydrogenated with atomic hydrogen before deposition of the next subsequent layer. The semiconductor bodies thus produced are useful as basic or raw materials for fabricating solar cells.
REFERENCES:
patent: 3485666 (1969-12-01), Sterling et al.
patent: 4064521 (1977-12-01), Carlson
patent: 4151058 (1979-04-01), Kaplan et al.
patent: 4196438 (1980-04-01), Carlson
patent: 4202928 (1980-05-01), Staebler
Grabmaier Josef
Kruehler Wolfgang
Plaettner Rolf
Newsome John H.
Siemens Aktiengesellschaft
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