Method of manufacturing saw devices

Details Method of manufacturing saw devices Method of manufacturing saw devices

1988-10-28

1990-01-02

Hall, Carl E.

Metal working

Piezoelectric device making

29593, 156627, 156632, 156651, 310313B, 310313D, 427100, H01L 4122

Patent

active

048903698

ABSTRACT:
A method of manufacturing surface acoustic wave devices includes providing a dielectric substrate with a plurality of channels which open onto a substrate surface region and each of which accommodates a metallic electrode, the electrodes being recessed below the substrate surface region by an actual distance which at least equals a desired distance at which the electrodes have a minimum acoustic reflectivity, testing the performance of the device to ascertain at least the acoustic reflectivity of the electrodes, and etching at least the dielectric substrate, when it is ascertained during the testing that the acoustic electrode reflectivity is excessive, at least at the substrate surface region to a predetermined etching depth. The use of this method results in a device having reduced post-etching acoustic electrode reflectivity as a result of the thus obtained reduction in the difference between the actual and desired distances.

REFERENCES:
patent: 4130813 (1978-12-01), Sandy et al.
patent: 4364016 (1982-12-01), Tanski
patent: 4672254 (1987-06-01), Dolat et al.
patent: 4773138 (1988-09-01), Ballato et al.

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