Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2008-04-22
2008-04-22
Arbes, Carl J. (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S592100, C029S825000, C029S832000
Reexamination Certificate
active
11102269
ABSTRACT:
A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.
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Ishii Hiromu
Kyuragi Hakaru
Machida Katsuyuki
Morimura Hiroki
Sato Norio
Arbes Carl J.
Blakely & Sokoloff, Taylor & Zafman
Nippon Telegraph and Telephone Corporation
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