Method of manufacturing quartz crystal vibrating piece

Details Method of manufacturing quartz crystal vibrating piece Method of manufacturing quartz crystal vibrating piece

2006-01-27

2008-12-02

Lindsay, Jr., Walter (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S048000, C438S551000, C438S552000, C257SE21415

Reexamination Certificate

active

07459334

ABSTRACT:
A method of manufacturing a quartz crystal vibrating piece is provided. Etching masks of different sizes are each arranged on respective front and rear surfaces of a quartz crystal wafer such that the etching mask on one of the surfaces (e.g., the rear surface) is larger than the other etching mask. The quartz crystal wafer is etched using the etching masks so that a projection is formed on a side of the quartz crystal wafer due to the difference in size of the etching masks, and is overetched to remove the projection.

REFERENCES:
patent: 5998233 (1999-12-01), Sugitani et al.
patent: 6332567 (2001-12-01), Ikegami et al.
Patent Abstracts of Japan, publication No. 10-270967, publication date Oct. 9, 1998.

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