Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate
2010-03-10
2011-11-15
Kelly, Cynthia (Department: 1722)
Etching a substrate: processes
Masking of a substrate using material resistant to an etchant
C216S083000, C430S302000, C430S310000
Reexamination Certificate
active
08057691
ABSTRACT:
A method of manufacturing a precise printing plate, and a method of manufacturing an LCD device using the same are disclosed, the method of manufacturing the precise printing plate comprising forming a mask layer of a predetermined pattern on a substrate; etching the substrate with an etchant including an anionic surfactant by using the mask layer of the predetermined pattern, to thereby form a trench; and removing the mask layer.
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Kwon Oh Nam
Yoo Soon Sung
Brinks Hofer Gilson & Lione
Kelly Cynthia
LG Display Co. Ltd.
Robinson Chanceity
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