Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having growth from a solution comprising a solvent which is...
Reexamination Certificate
2007-05-29
2007-05-29
Kunemund, Robert (Department: 1722)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Having growth from a solution comprising a solvent which is...
C117S070000, C117S045000, C117S940000
Reexamination Certificate
active
10761147
ABSTRACT:
A method of manufacturing a potassium niobate (KNbO3) single crystal thin film, includes the steps of maintaining the substrate under a predetermined oxygen partial pressure; maintaining the substrate within a temperature region which is equal to or higher than an eutectic temperature of KNbO3and 3K2O.Nb2O5and is equal to or lower than complete melting temperature of KNbO3and 3K2O.Nb2O5so that a solid phase of KNbO3and a liquid phase can coexist on the substrate; depositing a vapor phase material on the substrate in a state in which a solid phase and a liquid phase coexist; and precipitating KNbO3on the substrate from the liquid phase as a solid phase to grow a KNbO3single crystal thin film. The composition of a starting material to be vaporized to generate the vapor phase material is from K2O.Nb2O5=50:50 to K2O.Nb2O5=65:35.
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Higuchi Takamitsu
Iwashita Setsuya
Miyazawa Hiromu
Harness & Dickey & Pierce P.L.C.
Kunemund Robert
Seiko Epson Corporation
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