Method of manufacturing polyimide thin film and method of manufa

Details Method of manufacturing polyimide thin film and method of manufa Method of manufacturing polyimide thin film and method of manufa

1990-08-23

1991-10-29

McCamish, Marion E.

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

427 541, 522164, 528350, 528352, 528353, B05D 104, B05D 306, C08J 328, C08G 6926

Patent

active

050615092

ABSTRACT:
A polyimide thin film is formed on a substrate by imparting energy under vacuum, by means of heating, ultraviolet light or electron beam irradiation, or a combination thereof, to a polyimide having in the polymer main chain imide bonds and decomposable bonds such as carbon-carbon single bond differing from the imide bonds so as to break the decomposable bonds.

REFERENCES:
patent: 3686022 (1972-08-01), White et al.
patent: 4590103 (1986-05-01), Ahne et al.

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