Method of manufacturing polishing pad

Details Method of manufacturing polishing pad Method of manufacturing polishing pad

2006-11-07

2006-11-07

Kuhns, Allan R. (Department: 1732)

Plastic and nonmetallic article shaping or treating: processes

Pore forming in situ

By gas forming or expanding

C264S219000, C264S255000, C264S317000

Reexamination Certificate

active

07132070

ABSTRACT:
A method of manufacturing a polishing pad is described. A mold having a mold cavity therein is provided. At least a strip is buried in the mold. A polymer foam material is injected into the mold cavity of the mold. The polymer foam material is cured to mold the polymer foam material into a molding polymer article. A mold release process is performed to obtain the molding polymer article. The strip on the molding article is removed to form a polishing pad having at least one groove thereon.

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