Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Mesa formation
Patent
1997-08-28
1999-03-30
Bowers, Charles
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Mesa formation
438 45, 372 45, H01L 2120
Patent
active
058888420
ABSTRACT:
A method for manufacturing a surface-emitting laser array device is disclosed. In order to control the polarization characteristics of the surface-emitting laser, the surface-emitting laser array device according to the present invention can be manufactured by alternately arranging the surface-emitting laser formed by inclining a cavity in the <110> and <110> direction in accordance with the row or the column direction of the surface-emitting laser, so that the polarization characteristics of the surface-emitting laser in two directions which are relatively perpendicular to each other may be obtained. According to the present invention, it has an advantageous effect that the interaction between the adjacent laser beams can be minimized with maintaining the symmetric feature of the lasing beam when manufacturing an integrated surface-emitting laser array device. Further, since the traveling direction of the lasing beam can be controlled depending upon the polarization characteristics, not only the optical interconnection or optical switching can easily be performed, but also the device can effectively be applied to the device, for example, the magneto-optic disk which is sensitive to the polarization characteristics.
REFERENCES:
patent: 5712188 (1998-01-01), Chu et al.
Toshikazu Mukaihara, et al., "Polarization Control of Vertical-Cavity Surface-Emitting Lasers Using a Birefringent Metal/Dielectric Polarizer Loaded on Top distributed Bragg reflector", IEEE Journal of Selected Topics in quantum Electronics, vol. 1, No. 2, Jun. 1995, pp. 667-673.
Chu Hye Yong
Park Hyo-Hoon
Yoo Byueng-Su
Bowers Charles
Christianson Keith
Electronics and Telecommunications Research Institute
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