Method of manufacturing pn-junction device II-VI compound semico

Fishing – trapping – and vermin destroying

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437127, 437228, H01L 21265, H01L 2120

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active

052159299

ABSTRACT:
This invention relates to a pn-junction device, especially a blue light-emitting diode and a method of the manufacturing thereof. The pn-junction is formed between a superlattice region and a n-type semiconductor region, the superlattice region consisting of a plurality of stacked pairs of ZnSe semiconductor layer and acceptor-impurity-doped ZnS.sub.0.12 Se.sub.0.88 mixed crystal semiconductor layer formed on a part of a buffer layer of ZnS.sub.0.06 Se.sub.0.94 etc. which is formed on a crystalline substrate of GaAs etc., the n-type semiconductor region being formed on the part of the buffer layer, where the superlattice is not formed, and the side wall of the superlattice region contiguous to the n-type region to form pn-junction being made clean by etching, so that a pn-junction of n-type semiconductor and p-type semiconductor having high carrier-density resulted.

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patent: 4648938 (1987-03-01), Ashlay et al.
patent: 4741801 (1988-05-01), Coleman
patent: 4866489 (1989-09-01), Yokogawa et al.
patent: 4963507 (1990-10-01), Amann et al.
patent: 5045894 (1991-09-01), Migita et al.

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