Method of manufacturing platinum resistance thermometer

Details Method of manufacturing platinum resistance thermometer Method of manufacturing platinum resistance thermometer

1986-09-10

1989-02-21

Echols, P. W.

Metal working

Method of mechanical manufacture

Electrical device making

338 25, 338292, 338308, 427102, 427103, H01C 1706

Patent

active

048052965

ABSTRACT:
A method of manufacturing a resistance thermometer which includes the steps of preparing a support substrate and forming a platinum film, which serves as a temperature measuring element, on the support substrate by a sputtering process employing a sputtering gas which contains a predetermined amount of oxygen gas, and a resistance thermometer produced by the method. The method which optionally includes forming an aluminum oxide film, the substrate and the platinum film.

REFERENCES:
patent: 4129848 (1978-12-01), Frank et al.
patent: 4649365 (1987-03-01), Furubayashi et al.

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