Method of manufacturing plasma display panel

Details Method of manufacturing plasma display panel Method of manufacturing plasma display panel

2006-11-10

2011-11-01

Lin, James (Department: 1715)

Coating processes

Electrical product produced

Fluorescent or phosphorescent base coating

C427S008000, C427S068000

Reexamination Certificate

active

08048476

ABSTRACT:
Evaporation chamber for depositing a protective film on a surface, where a dielectric layer is formed, of front substrate, front substrate is formed a display electrode and the dielectric layer thereon; transporting unit for transporting front substrate into evaporation chamber; gas introducing units for introducing gas containing H2O into evaporation chamber; and partial pressure detecting unit for measuring a certain partial pressure of gas within evaporation chamber, extending from the center of deposition space of evaporation chamber to the downstream of transport direction of front substrate are provided. Gas containing H2O is introduced from gas introducing units such that the partial pressure of gas is controlled in the partial pressure detecting unit.

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Chinese Office Action dated Mar. 27, 2009.
International Search Report (PCT/JP2006/322433) dated Feb. 13, 2007.

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