Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2010-08-16
2011-11-15
Dougherty, Thomas (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S348000, C310S365000, C310S366000
Reexamination Certificate
active
08058778
ABSTRACT:
There is provided a piezoelectric vibrator1that includes a base substrate2, a lid substrate3, a piezoelectric vibrating reed4, a pair of external electrodes38and39, a pair of through electrodes32and33, and routing electrodes36and37. The lid substrate3includes a recess3afor a cavity and is bonded to the base substrate so that the recess faces the base substrate. The piezoelectric vibrating reed4is bonded to the upper surface of the base substrate in a cavity that is formed between both the substrates. The pair of external electrodes38and39is formed on the lower surface of the base substrate. The pair of through electrodes32and33is formed so as to pass through the base substrate and is electrically connected to the pair of external electrodes, respectively. The routing electrodes36and37are formed on the upper surface of the base substrate and electrically connect the pair of through electrodes to the piezoelectric vibrating reed. The through electrodes include electrode films32aand33athat are formed on the inner surfaces of the through holes30and31, and glass bodies32band33bthat are fixed to the inner surfaces of the through holes with the electrode films interposed therebetween so as to close the through holes.
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International Search Report for International Application No. PCT/JP2008/072889, dated Mar. 17, 2009, 2 pages.
Aratake Kiyoshi
Numata Masashi
Brinks Hofer Gilson & Lione
Dougherty Thomas
Seiko Instruments Inc.
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