Metal working – Piezoelectric device making
Reexamination Certificate
2010-08-17
2011-12-06
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S594000, C029S852000, C428S402000, C310S344000
Reexamination Certificate
active
08069543
ABSTRACT:
There is provided a piezoelectric vibrator1that includes a base substrate2, a lid substrate3, a piezoelectric vibrating reed4, a pair of external electrodes38and39, a pair of through electrodes32and33, and routing electrodes36and37. The lid substrate3includes a recess3afor a cavity and is bonded to the base substrate so that the recess faces the base substrate. The piezoelectric vibrating reed4is bonded to the upper surface of the base substrate so as to be received in a cavity that is formed between both the substrates. The pair of external electrodes38and39is formed on the lower surface of the base substrate. The pair of through electrodes32and33is formed by hardening paste P, which contains a plurality of metal fine particles and a plurality of metal beads P1, so as to pass through the base substrate, maintains airtightness in the cavity, and is electrically connected to the pair of external electrodes, respectively. The routing electrodes36and37are formed on the upper surface of the base substrate and electrically connect the pair of through electrodes to the piezoelectric vibrating reed. The melting point of the metal bead is higher than the firing temperature of the paste.
REFERENCES:
patent: 5283104 (1994-02-01), Aoude et al.
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patent: 2006-279872 (2006-10-01), None
patent: 2007-013628 (2007-01-01), None
International Search Report for International Application No. PCT/JP2008/072620, dated Feb. 24, 2009, 2 pages.
Aratake Kiyoshi
Numata Masashi
Brinks Hofer Gilson & Lione
Seiko Instruments Inc.
Tugbang A. Dexter
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