Method of manufacturing piezoelectric-resonator having vibrating

Details Method of manufacturing piezoelectric-resonator having vibrating Method of manufacturing piezoelectric-resonator having vibrating

1993-11-12

1995-05-02

Vo, Peter Dungba

Metal working

Piezoelectric device making

310340, H01L 4122, H01L 4108

Patent

active

054107890

ABSTRACT:
In a chip-type piezoelectric-resonator, which is protected with thermosetting resin, mother sheets are bonded to cover both major surfaces of a mother substrate having a plurality of piezoelectric resonance elements which are provided on a piezoelectric substrate, in order to properly form vibrating spaces. The mother sheets are provided with concave portions for defining cavities for vibration. Then, protective resin is applied to cover the mother substrate which is bonded with the mother sheets, and thereafter the mother substrate is divided so as to obtain a plurality of chip-type piezoelectric-resonators.

REFERENCES:
patent: 4445256 (1984-05-01), Huguenin et al.
patent: 4571794 (1986-02-01), Nakamura
patent: 4627533 (1986-12-01), Pollard
patent: 4920641 (1990-05-01), Nakamura
patent: 5121024 (1992-06-01), Seto
patent: 5184043 (1993-02-01), Yoshinaga
"Monolithic Clock Oscillator" Polinski et al, vol. 1, No. 1, Motorola Technical Disclosure Bulletin, Aug. 1980, p. 8.

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