Method of manufacturing piezoelectric element and method of...

Details Method of manufacturing piezoelectric element and method of... Method of manufacturing piezoelectric element and method of...

2006-07-05

2009-11-10

Banks, Derris H (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C029S830000, C029S831000, C029S832000, C029S842000, C347S068000

Reexamination Certificate

active

07614128

ABSTRACT:
While a piezoelectric element is being formed by sequentially laminating a lower electrode whose uppermost layer is made of iridium, a titanium layer, a piezoelectric layer and an upper electrode to each other on a substrate, the piezoelectric layer is formed, by an MOD method, on the titanium layer with an contact angle of water to the surface thereof which is no less than 40°.

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patent: 6419849 (2002-07-01), Qiu et al.
patent: 6494567 (2002-12-01), Murai
patent: 6599757 (2003-07-01), Murai
patent: 11-191646 (1999-07-01), None

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