Method of manufacturing photovoltaic device

Fishing – trapping – and vermin destroying

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437109, 437233, 437967, 136258, H01L 310368

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051550512

ABSTRACT:
A method of manufacturing a photovoltaic device, wherein an amorphous semiconductor layer of one conductivity type doped with impurities which determine the conductivity type is formed on a substrate having a conductive surface, an insulating film is formed on this amorphous semiconductor layer, the insulating film is patterned to partially form aperture regions where the surface of said amorphous semiconductor layer is exposed, an intrinsic amorphous semiconductor layer on said insulating film and the aperture regions formed over the substrate, the amorphous semiconductor layer of one conductivity type and the intrinsic amorphous semiconductor layer are thermally treated, crystallization is advanced using the amorphous semiconductor layer of one conductivity type located beneath said aperture region as a core to form a polycrystal semiconductor layer of one conductivity type, a semiconductor layer of the other conductivity type is formed on this polycrystal semiconductor layer, and an electrode is formed in contact with the semiconductor layer region of the other conductivity type located over said aperture regions.

REFERENCES:
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patent: 4431858 (1984-02-01), Gonzalez et al.
Sarma, K., "Polycrystalline Silicon Solar Cells from Recrystallized Plasma Deposited Thin Films", Journal of Electronic Materials, vol. 9, No. 5, 1980, pp. 841-856.
Brodsky, M., "Making Higher Efficiency Solo Cells with Polycrystalline Si Films", IBM Tech. Disc. Bull. vol. 18, No. 2, Jul. 1975, pp. 582-583.
Fisher, Ite, "Low Cost . . . Silicon", IEEE Transactions on Electron Devices, vol. ED-24, No. 4, Apr., 1977, pp. 438-442.
Wallace, J., "Crystallized Amorphous Silicon for Low Cost Solar Cells", Solar Cells, 30 (1991) pp. 403-413.
Charles, H., "Review of Amorphous . . . Parameters", Solar Energy, vol. 24, 1980, pp. 329-339.
Optimum Design of a-Si/poly c-Si Stacked Solar Cell, pp. 394-397 Technical Digest of 2nd Int. Photovoltaic Science & Engineering Conference, 1986.

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