Method of manufacturing P-type compound semiconductor

Details Method of manufacturing P-type compound semiconductor Method of manufacturing P-type compound semiconductor

1994-01-12

1995-11-21

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437105, 437174, 437247, 148DIG64, H01L 21203

Patent

active

054686784

ABSTRACT:
A method for manufacturing a III-V Group compound or a II-VI Group compound semiconductor element by VPE, comprising the step of annealing a grown compound at 400.degree. C. or higher, or irradiating electron beam the grown compound at 600.degree. C. or higher.

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