Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2002-10-11
2004-06-29
Niebling, John F. (Department: 2812)
Semiconductor device manufacturing: process
Having organic semiconductive component
C438S021000, C438S030000, C438S069000, C438S082000, C438S780000, C438S782000
Reexamination Certificate
active
06756249
ABSTRACT:
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is based upon and claims the benefit of priority from the prior Japanese Patent Application No. 2001-316871, filed Oct. 15, 2001, the entire contents of which are incorporated herein by reference.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a method of manufacturing an organic electroluminescent device.
2. Description of the Related Art
An organic electroluminescent device is constructed to have an organic thin film layer containing a hole transport organic material, a luminescent organic material, and an electron transport organic material sandwiched between two electrodes. Where the organic electroluminescent device is used as a display device, a pattern of the organic thin film layer is formed in accordance with the color of the emitted light.
The conventional patterning method of an organic thin film layer includes, for example, a masked vacuum deposition method, a screen-printing method, a stamping method, a masked dye diffusion method, an ink jet printing method, and a micro gravure method.
On the other hand, in the case of forming an organic thin film layer having a large area, any of the conventional methods referred to above gives rise to the problem that a large-scale apparatus is required, or the film-forming time is long.
BRIEF SUMMARY OF THE INVENTION
An object of the present invention is to provide a method of manufacturing in a short time an organic electroluminescent device including an organic thin film layer of large area.
According to a first aspect of the present invention, there is provided a method of manufacturing an organic electroluminescent device, comprising the steps of: forming a first electrode on a substrate; forming on the first electrode at least one organic thin film layer containing at least one kind of a material selected from the group consisting of a hole transport organic material, an electron transport organic material, and a luminescent organic material; and forming a second electrode on the organic thin film layer; wherein the step of forming at least one organic thin film layer comprising the steps of: preparing a solution containing at least one kind of a material selected from the group consisting of a hole transport organic material, an electron transport organic material, and a luminescent organic material; and spraying the solution onto the first electrode by using a pressurized gas.
In another embodiment of the present invention, it is possible to form one organic thin film layer by the steps of: preparing one kind of a solution containing a hole transport organic material, an electron transport organic material, and a luminescent organic material; and spraying the solution onto the first electrode by using a pressurized gas.
In anther embodiment of the present invention, it is possible to form two organic thin film layers of a lower layer and an upper layer by the steps of: preparing a first solution containing a hole transport organic material and a second solution containing an electron transport organic material and a luminescent organic material; and spraying in a predetermined order the first and second solutions onto the first electrode by using a pressurized gas.
In another embodiment of the present invention, it is possible to form two organic thin film layers of a lower layer and an upper layer by the steps of: preparing a first solution containing a hole transport organic material and a luminescent organic material and a second solution containing an electron transport organic material; and spraying in a predetermined order the first and second solutions onto the first electrode by using a pressurized gas.
In another embodiment of the present invention, it is possible to form three organic thin film layers of a lower layer, an intermediate layer, and an upper layer by the steps of: preparing first, second and third solutions containing a hole transport organic material, a luminescent organic material and an electron transport organic material, respectively; and spraying in a predetermined order the first to third solutions onto the first electrode by using a pressurized gas.
Further, in still another embodiment of the present invention, it is possible to form two or more organic thin film layers by the steps of: preparing a solution containing at least one kind of a material selected from the group consisting of a hole transport organic material, an electron transport organic material, and a luminescent organic material, followed by spraying the solution by using a pressurized gas, thereby forming at least one organic thin film layer; and forming the remaining organic thin film layer by a spin coating method, a vacuum deposition method or an ink jet printing method, where the former and latter steps are performed in a predetermined order.
In the method of the present invention, where the organic thin film is formed of two or more layers, the organic thin film layers are formed in a predetermined order such that the organic thin film layer containing a hole transport organic material is formed in contact with the anode, and the organic thin film layer containing an electron transport organic material is formed in contact with the cathode.
Additional objects and advantages of the present invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the present invention. The objects and advantages of the present invention may be realized and obtained by means of the instrumentalities and combinations particularly pointed out hereinafter.
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Echigo Tadahiro
Naka Shigeki
Okada Hiroyuki
Onnagawa Hiroyoshi
Isaac Stanetta
Niebling John F.
President of Toyama University
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