Method of manufacturing optical waveguide and method of...

Etching a substrate: processes – Forming or treating optical article

Reexamination Certificate

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C264S001240

Reexamination Certificate

active

08048324

ABSTRACT:
A method of manufacturing an optical waveguide includes: forming a first reflective bump and a second reflective bump, which have inclined surfaces formed on sides opposite to each other and which are disposed with a predetermined distance in-between, on an upper side of a conductive carrier; polishing the surfaces of the first reflective bump and the second reflective bump; forming a core between the first reflective bump and the second reflective bump; stacking an upper cladding over the upper side of the carrier to cover the first reflective bump, the second reflective bump, and the core; removing the carrier; and stacking a lower cladding over a lower side of the upper cladding. Forming reflective bumps on a conductive carrier, and polishing the reflective bumps to form inclined surfaces, can reduce lead time and can provide a high degree of freedom in design.

REFERENCES:
patent: 6166372 (2000-12-01), Yamamoto et al.
patent: 6480639 (2002-11-01), Hashimoto et al.
patent: 6504966 (2003-01-01), Kato et al.
patent: 7095928 (2006-08-01), Blauvelt et al.
patent: 2002/0001427 (2002-01-01), Hashimoto et al.
patent: 2002/0097962 (2002-07-01), Yoshimura et al.
patent: 2002/0114556 (2002-08-01), Kato et al.
patent: 2004/0218849 (2004-11-01), Blauvelt et al.

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