Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-03-08
2005-03-08
Kim, Paul D (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S592100, C073S514320, C073S514330, C073S514360, C216S065000, C451S005000, C451S041000
Reexamination Certificate
active
06862795
ABSTRACT:
A method of manufacturing a monolithic silicon acceleration sensor is disclosed. The monolithic silicon acceleration sensor includes one or more sensor cells, each sensor cell having an inertial mass positioned by beam members fixed to a silicon support structure. According to the method, a sandwiched etch-stop layer is formed. First sections of the inertia mass and beam members are also formed. In addition, a second section of the inertial mass is formed. Further, an inertial mass positioned by beam members fixed to a silicon support structure is formed. Also, a first cover plate structure is bonded to a first surface of the silicon support structure.
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Kim Paul D
Squire Sanders & Dempsey L.L.P.
VTY Holding Oy
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