Method of manufacturing multilayer array ultrasonic transducers

Details Method of manufacturing multilayer array ultrasonic transducers Method of manufacturing multilayer array ultrasonic transducers

1996-09-04

1998-01-06

Hall, Carl E.

Metal working

Piezoelectric device making

310334, 310336, 367155, H01L 4122

Patent

active

057041059

ABSTRACT:
A method for fabricating "1.5D" and "2D" multilayer ultrasonic transducer arrays employs dicing saw kerfs, which provide acoustic isolation between rows. The kerfs are metallized to provide electrical connection between surface electrode layers and buried internal electrode layers. A multilayer piezoceramic transducer element for a "1.5D" or "2D" array produced by this method has higher capacitance, and accordingly provides better transducer sensitivity, in comparison to a single layer element.

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R.L. Goldberg and S.W. Smith, "Performance of Multilayer 2-D Transducer Arrays," Proceedings of the IEEE Ultrasonics Symposium, pp. 1103-1106, 1993.
M. Greenstein and U. Kumar, "Multilayer Peizoelectric Resonators for Medical Ultrasound Transducers," IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, vol. 43, No. 4, Jul. 1966.

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