method of manufacturing multi-layer type ink jet recording head

Metal working – Piezoelectric device making

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347 71, H01L 4122

Patent

active

061347612

ABSTRACT:
Green sheets of ceramic are stacked and sintered, to form a pressure-generating-chamber forming member 7 which forms pressure generating chambers 4 with its one surface sealed with an elastic board 2, a flow path regulating board 61 which has flow path regulating holes 60 which apply flow path resistance to ink supplying paths connected to the pressure generating chambers 4, and a common-ink-chamber forming board 18 which has a common ink chamber 19 which is communicated through the flow path regulating holes 60 with the pressure generating chambers 4 which are joined together with no adhesive layer, thus providing a flow path forming member. A green sheet of piezoelectric material is laid on the surface of the elastic board 2, and sintered, to form piezo-electric vibrating plates 3 thereon. The flow path forming member is great in mechanical strength, and is prevented from being bent by the contraction which may occurs when the piezo-electric material is sintered. In addition, the through-holes in the components of the flow path forming member can be corrected in position or in configuration when they are in the form of green sheets.

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