Coating processes – Electrical product produced – Condenser or capacitor
Patent
1991-05-29
1992-11-03
Bell, Janyce
Coating processes
Electrical product produced
Condenser or capacitor
4271262, 4271263, 427226, 427240, 427435, 4274432, 427399, 427404, 4274192, 4274193, 437235, B05D 512
Patent
active
051607620
ABSTRACT:
A method of manufacturing monolayer capacitors having a ferroelectric layer on the basis of titanium as a dielectric on a substrate, the ferroelectric layer being located between a first and a second noble metal electrode, in which the ferroelectric layer is formed as a barium titanate layer having a layer thickness in the range of from 0.2 to 0.6 .mu.m in that a stable solution of salts of carbonic acids, alkoxides and/or acetyl acetonates is applied and is thermally decomposed at temperatures in the range of from 500.degree. to 700.degree. C., the solution constituting the ferroelectric layer being adjusted so that after the thermal decomposition process an excess quantity of titanium oxide of about 1 mol. % is obtained, and this coating process being repeated until the desired layer thickness is attained, after which the second noble metal electrode is provided on the ferroelectric layer.
REFERENCES:
patent: 4485094 (1984-11-01), Pebler et al.
patent: 4584280 (1986-04-01), Nango et al.
patent: 4704299 (1987-11-01), Wielonski et al.
patent: 4963390 (1990-10-01), Lipeles
patent: 5006363 (1991-04-01), Fujii et al.
Brand Hans-Wolfgang
De Vries Johan W. C.
Klee Mareike K.
Waser Rainer M.
Wolters Robertus A. M.
Bell Janyce
Kraus Robert J.
U.S. Philips Corporation
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