Semiconductor device manufacturing: process – Semiconductor substrate dicing
Reexamination Certificate
2005-03-15
2005-03-15
Booth, Richard A. (Department: 2812)
Semiconductor device manufacturing: process
Semiconductor substrate dicing
Reexamination Certificate
active
06867111
ABSTRACT:
In a method of manufacturing modules (4), each with at least one integrated circuit (2), the integrated circuits (2) are separated from a previously manufactured circuit configuration (1), which is in the form of a flexible film comprising a plurality of integrated circuits (2) on the basis of a polymer, by a combined stamping-vacuum conveying device (6), after which each of the separated integrated circuits (2) is conveyed to a module substrate (5) and connected to the module substrate (5) so as to form a module (4).
REFERENCES:
patent: 6133835 (2000-10-01), DeLeeuw et al.
Brugger Christian
De Lange Anthonie Arie
Fritz Reinhard
Van Roosmalen Johannes Henricus Maria
Weekamp Johannus Wilhelmus
Booth Richard A.
Koninklijke Philips Electronics , N.V.
Simons Kevin
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