Method of manufacturing micromechanical devices

Details Method of manufacturing micromechanical devices Method of manufacturing micromechanical devices

1991-06-24

1993-05-04

Hall, Carl E.

Metal working

Method of mechanical manufacture

Electrical device making

29596, 310 40MM, 310 45, 427132, 427504, H01K 1502

Patent

active

052069834

ABSTRACT:
Micromechanical devices are formed on a substrate using a sacrificial layer deep X-ray lithography process to produce a rotating microrotor which is driven magnetically. The rotor typically has a diameter of a few hundred microns or less and is formed as a free structure which is assembled onto a hub formed on a substrate. Stator pole pieces are formed on the substrate of a ferromagnetic material surrounding the rotor, and are al

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Roger T. Howe, et al., "Silicon Micromechanics: Sensors and Actuators on a Chip", IEEE Spectrum, Jul. 1990, pp. 29-35.

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