Method of manufacturing microlens substrate, and microlens...

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements

Reexamination Certificate

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C355S067000, C355S071000

Reexamination Certificate

active

07142366

ABSTRACT:
Provided is a method of manufacturing a microlens substrate capable of facilitating optical axis alignment and simplifying manufacturing processes by patterning a lens shape of a second microlens array using a first microlens array. The lens shape of the cylindrical second microlens array is patterned by irradiating the first microlens array with ultraviolet rays. Light emitted from a linear light source which is variable in its position is imaged on a focal surface of the first microlens array by a collimator lens and the first microlens array, and a resist layer formed by being coated on the focal surface is exposed. By performing exposure while changing the position of the linear light source, a resist pattern of a desired cylindrical shape can be obtained. Thereafter, etching is performed to transfer the shape of the resist pattern onto an intermediate glass layer, and recesses are buried with a high refractive index UV curable resin.

REFERENCES:
patent: 5164223 (1992-11-01), Tsujino et al.
patent: 5666176 (1997-09-01), Kurematsu
patent: 2004/0051977 (2004-03-01), Kitamura et al.
patent: 07-181487 (1995-07-01), None
patent: 09-090336 (1997-04-01), None

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