Method of manufacturing microlens, microlens, microlens...

Details Method of manufacturing microlens, microlens, microlens... Method of manufacturing microlens, microlens, microlens...

2005-07-07

2008-05-13

Spector, David (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

C359S620000, C359S900000, C264S001700, C216S026000

Reexamination Certificate

active

07372631

ABSTRACT:
A method of manufacturing a microlens includes: forming on a transparent substrate an etching stop layer in a lens formation region where a curved lens surface of the microlens is to be formed, the etching stop layer having an island shape as a planar shape thereof; forming an intermediate layer on the etching stop layer; forming an etching mask layer on the intermediate layer, the etching mask layer having an opening at a position facing the etching stop layer; and etching, by means of isotropic etching, the intermediate layer from the opening, and etching the transparent substrate and the intermediate layer from a side of the etching stop layer.

REFERENCES:
patent: 6781762 (2004-08-01), Ozawa
patent: A-2000-193928 (2000-07-01), None

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