Method of manufacturing microlens, microlens, microlens...

Details Method of manufacturing microlens, microlens, microlens... Method of manufacturing microlens, microlens, microlens...

2006-06-20

2006-06-20

Mack, Ricky (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

C359S619000

Reexamination Certificate

active

07064901

ABSTRACT:
A method of manufacturing a microlens includes: forming on a transparent substrate a first film which has an etching rate higher than the transparent substrate, forming on the first film a mask in which a pit is provided at a position corresponding to a center of the microlens to-be-formed, and wet-etching the first film and the transparent substrate through the mask, to thereby excavate in the transparent substrate a non-spherical recess which defines a curved surface of the microlens.

REFERENCES:
patent: 6297911 (2001-10-01), Nishikawa et al.
patent: 6469832 (2002-10-01), Yotsuya et al.
patent: 6519761 (2003-02-01), Satoh
patent: 05027104 (1993-02-01), None
patent: A-07-106537 (1995-04-01), None
patent: A 09-127496 (1997-05-01), None
patent: A-2000-075106 (2000-03-01), None
patent: A 2002-006113 (2002-01-01), None

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