Method of manufacturing micro-tip and female mold substrate ther

Details Method of manufacturing micro-tip and female mold substrate ther Method of manufacturing micro-tip and female mold substrate ther

1996-09-12

1999-02-02

Knode, Marian C.

Etching a substrate: processes

Nongaseous phase etching of substrate

With measuring, testing, or inspecting

B44C 122

Patent

active

058660216

ABSTRACT:
A micro-tip is manufactured by forming a recess portion on a first substrate consisting of monocrystalline silicon for forming a tip. A peeling layer is formed on the recess portion, and contact layer is formed on at least a portion other than the peeling layer on the substrate. A tip material layer is formed on the peeling layer and the contact layer. The tip material layer on the peeling layer is transferred onto a second substrate.

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