Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2011-05-31
2011-05-31
Choi, William C (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224100
Reexamination Certificate
active
07952787
ABSTRACT:
Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.
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Kogut Lior
Tung Ming-Hau
Choi William C
Knobbe Martens Olson & Bear LLP
QUALCOMM MEMS Technologies Inc.
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