Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate
2009-03-09
2011-10-25
Deo, Duy (Department: 1713)
Etching a substrate: processes
Forming or treating article containing magnetically...
C216S044000, C216S045000, C216S058000, C216S075000
Reexamination Certificate
active
08043516
ABSTRACT:
According to one embodiment, a method of manufacturing a magnetic recording medium includes forming protruded magnetic patterns on a substrate, depositing a nonmagnetic material in recesses between the magnetic patterns and on the magnetic patterns, and etching back the nonmagnetic material using an oxygen-containing etching gas while reforming a surface of the nonmagnetic material.
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Kamata Yoshiyuki
Kimura Kaori
Sakurai Masatoshi
Shirotori Satoshi
Deo Duy
Kabushiki Kaisha Toshiba
Pillsbury Winthrop Shaw & Pittman LLP
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