Method of manufacturing magnetic recording medium

Details Method of manufacturing magnetic recording medium Method of manufacturing magnetic recording medium

2010-02-12

2011-10-04

Vinh, Lan (Department: 1713)

Etching a substrate: processes

Forming or treating article containing magnetically...

C216S040000, C216S075000, C438S754000

Reexamination Certificate

active

08029682

ABSTRACT:
According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist, etching the second hard mask by using the patterned resist as a mask to transfer the patterns of protrusions and recesses to the second hard mask, etching the first hard mask by using the second hard mask as a mask to transfer the patterns of protrusions and recesses to the first hard mask, subjecting the magnetic recording layer exposed in the recesses to modifying treatment to change an etching rate, and deactivating the magnetic recording layer exposed in the recesses.

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