Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate
2011-03-22
2011-03-22
Tran, Binh X (Department: 1713)
Etching a substrate: processes
Forming or treating article containing magnetically...
C216S066000, C216S067000, C216S076000, C216S077000
Reexamination Certificate
active
07910011
ABSTRACT:
A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an encasing layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes: the step of etching a nonmagnetic layer that will become the encasing layer later, such that an initial groove including the first portion is formed in the nonmagnetic layer; the step of forming an initial groove mask covering the first portion; and a second etching step for etching the nonmagnetic layer so as to complete the groove. When the second etching step starts, a portion of the top surface of the bottom forming layer located in a region in which the second portion is to be formed is covered with the nonmagnetic layer or the initial groove mask.
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Araki Hironori
Ishizaki Kazuo
Itoh Hiroyuki
Sasaki Yoshitaka
Tanemura Shigeki
Headway Technologies Inc.
Oliff & Berridg,e PLC
Tran Binh X
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