Method of manufacturing magnetic head for perpendicular...

Etching a substrate: processes – Forming or treating article containing magnetically...

Reexamination Certificate

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C216S066000, C216S067000, C216S076000, C216S077000

Reexamination Certificate

active

07910011

ABSTRACT:
A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an encasing layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes: the step of etching a nonmagnetic layer that will become the encasing layer later, such that an initial groove including the first portion is formed in the nonmagnetic layer; the step of forming an initial groove mask covering the first portion; and a second etching step for etching the nonmagnetic layer so as to complete the groove. When the second etching step starts, a portion of the top surface of the bottom forming layer located in a region in which the second portion is to be formed is covered with the nonmagnetic layer or the initial groove mask.

REFERENCES:
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patent: 7375925 (2008-05-01), Sasaki et al.
patent: 7768742 (2010-08-01), Giorgis et al.
patent: 2003/0151850 (2003-08-01), Nakamura et al.
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patent: 2006/0077589 (2006-04-01), Sasaki et al.
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patent: 2009/0135518 (2009-05-01), Weller et al.
patent: 2009/0152235 (2009-06-01), Hsiao et al.
patent: A-2006-331613 (2006-12-01), None
U.S. Appl. No. 11/727,371, filed in the name of Sasaki et al., Mar. 26, 2007.
Japanese Office Action dated Aug. 3, 2010 in Japanese Patent Application No. 2008 -313458 (with translation).

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